Semiconductor Manufacturing Equipment
“Columnar crystal silicon” - The crystallization of our world-class technological capabilities
Behind every technology that powers our lives, from smartphones to computers to self-driving cars, is advanced semiconductor manufacturing. With this rapid development, the demand for materials for semiconductor manufacturing equipment is increasing.
Mitsubishi Materials’ columnar crystal silicon is processed into various forms, primarily as a component of semiconductor manufacturing equipment, contributing to the semiconductor industry by supplying essential materials.
In recent years, as devices have become increasingly miniaturized and there has been a demand for the manufacture of higher-performance semiconductor chips, even small amounts of impurities can significantly impact performance and reliability. This has led to an increasing need to reduce impurities within semiconductor manufacturing equipment. Currently, the mainstream material for semiconductors is silicon. To avoid impurity contamination during the semiconductor production process, it is effective to use silicon, the common material, in the semiconductor manufacturing equipment. By using high-purity columnar crystal silicon as a component of the manufacturing equipment, the risk of impurity contamination can be reduced compared to using other materials, including quartz.
This is why columnar crystal silicon is sought for large-sized parts of semiconductor manufacturing equipment, for which other materials were conventionally used. However, large-sized silicon is prone to cracking, and its manufacturing and processing require high technical capabilities.
As such, Mitsubishi Materials leverages its manufacturing strengths, which have been established through the high-level precision casting technology. This enables the company to achieve stable production of ingots that are among the world’s largest, measuring 1200 mm in both width and length, to meet the demands for large-sized materials.
Mitsubishi Materials Group contributes to the development of the semiconductor industry by utilizing these world-class technical capabilities.
Mitsubishi Materials’ columnar crystal silicon is processed into various forms, primarily as a component of semiconductor manufacturing equipment, contributing to the semiconductor industry by supplying essential materials.
In recent years, as devices have become increasingly miniaturized and there has been a demand for the manufacture of higher-performance semiconductor chips, even small amounts of impurities can significantly impact performance and reliability. This has led to an increasing need to reduce impurities within semiconductor manufacturing equipment. Currently, the mainstream material for semiconductors is silicon. To avoid impurity contamination during the semiconductor production process, it is effective to use silicon, the common material, in the semiconductor manufacturing equipment. By using high-purity columnar crystal silicon as a component of the manufacturing equipment, the risk of impurity contamination can be reduced compared to using other materials, including quartz.
This is why columnar crystal silicon is sought for large-sized parts of semiconductor manufacturing equipment, for which other materials were conventionally used. However, large-sized silicon is prone to cracking, and its manufacturing and processing require high technical capabilities.
As such, Mitsubishi Materials leverages its manufacturing strengths, which have been established through the high-level precision casting technology. This enables the company to achieve stable production of ingots that are among the world’s largest, measuring 1200 mm in both width and length, to meet the demands for large-sized materials.
Mitsubishi Materials Group contributes to the development of the semiconductor industry by utilizing these world-class technical capabilities.
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Columnar crystal silicon
Polycrystalline silicon with a "columnar" crystal structure formed by unidirectional crystal growth and solidification. We contribute to society by providing large columnar crystal silicon that is high in purity and offers excellent machinability.
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